Bulk acoustic wave analysis of crystalline-plane-oriented aluminum nitride films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 10 A, 2007, Pages 6719-6726

  Lee, Maw Shung ^a   Wu, Sean ^b   Lin, Zhi Xun ^a   Ro, Ruyen ^c  

^a NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

^b TUNG FANG INSTITUTE OF TECHNOLOGY   (Taiwan)

^c I SHOU UNIVERSITY   (Taiwan)

Author keywords

AlN; Pure fast shear mode; Pure longitudinal mode

Indexed keywords

ACOUSTIC PROPERTIES; ALUMINUM COMPOUNDS; CRYSTALLINE MATERIALS; PRODUCT DESIGN; VIBRATION ANALYSIS;

ALN FILMS; BULK ACOUSTIC WAVE ANALYSIS; PURE FAST SHEAR MODE; PURE LONGITUDINAL MODE;

ACOUSTIC WAVES;

EID: 35348903112     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.6719     Document Type: Article

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