Tungsten-titanium diffusion barriers for silver metallization

Thin Solid Films

Volumn 515, Issue 4, 2006, Pages 1998-2002

  Bhagat, Shekhar ^a   Han, Hauk ^b   Alford, T L ^a  

^a Arizona State University   (United States)

^b Center for Solid State Electronics Research   (United States)

Author keywords

Diffusion barrier; Silver metallization; Titanium; Tungsten

Indexed keywords

AGGLOMERATION; DIFFUSION; FLUORESCENCE; SILVER; TUNGSTEN ALLOYS; X RAY DIFFRACTION ANALYSIS;

DIFFUSION BARRIER; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; HIGH TEMPERATURE ELECTRONICS;

METALLIZING;

EID: 33750819929     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.03.049     Document Type: Article

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