Single layer homogeneous model for surface roughness by polarized light scattering

Optics and Laser Technology

Volumn 40, Issue 2, 2008, Pages 315-324

  Singh, Udaibir ^a   Kapoor, Avinashi ^a  

^a UNIVERSITY OF DELHI   (India)

Author keywords

Homogeneous model; Polarized light; Scattering theory

Indexed keywords

LIGHT ABSORPTION; LIGHT POLARIZATION; LIGHT REFLECTION; OPACITY; REFRACTIVE INDEX; SURFACE ROUGHNESS;

HOMOGENEOUS MODELS; SCATTERING THEORY; SINGLE LAYER MODELS;

LIGHT SCATTERING;

EID: 34848875075     PISSN: 00303992     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlastec.2007.06.001     Document Type: Article

References (36)

1. Germer T.A. Polarized light scattering by microroughness and small defects in dielectric layers. J Opt Soc Am A 18 6 (2001) 1279-1288
2. Germer T.A. Angular dependence and polarization of out-of-plane optical scattering from particulate contamination, subsurface defects, and surface microroughness. Appl Opt 36 (1997) 8798-8805
3. Germer TA, Asmail CC. Bidirectional ellipsometry and its application to the characterization of surfaces, in polarization: measurement, analysis, and remote sensing, In: Proceedings of SPIE, vol. 3121, 1997. p. 173-82.
4. Germer T.A., Asmail C.C., and Scheer B.W. Polarization of out-of-plane scattering from microrough silicon. Opt Lett (1997) 1284-1286
5. Barrick DE. Radar cross section handbook. Plenum: New York; 1970.
6. Lukianowicz C. Optical instrument for evaluation of rough machined surfaces by angular distribution of scattered light. In: Pluta M, Szyjer M, editors. Proceedings of the international conference. Diffractometry and scatterometry (Warsaw, 24-28 May 1993). In: Proceedings SPIE, 1991, IAO Warsaw, Poland; 1994. p. 168-74.
7. Seitavuopio P., Rantanen J., and Yliruusi J. Use of roughness maps in visualisation of surfaces. Eur J Pharm Biopharm 59 (2005) 351-358
8. Łukianowicz Cz., and Karpiński T. Optical system for measurement of surface form and roughness. Meas Sci Rev 1 (2001) 151-154
9. Bennett J.M., and Mattsson L. Introduction to surface roughness and scattering (1989), Optical Society of America, Washington, DC
10. Gu Z-H, Maradudin AA, editors. Scattering and surface roughness. In: Proceedings of SPIE, vol. 3141, 1997. p. 220-31.
11. Stover JC, editor. Optical scattering in the optics, semiconductor, and computer disk industries. In: Proceedings of SPIE 1995. p. 2541.
12. Giovannini H., and Amra C. Scattering-reduction effect with overcoated rough surfaces: theory and experiment. Appl Opt 36 22 (1997) 5574-5579
13. Karabacak T., Zhao Y., Stowe M., Quayle B., and Wang G.C. Large-angle in-plane light scattering from rough surfaces. Appl Opt 39 25 (2000) 4658-4668
14. Stover J.C. Optical scattering: measurement and analysis (1995), SPIE Optical Engineering Press, Bellingham, WA
15. Kim J.H., Ehrman S.H., Mulholland G.H., and Germer T.A. Polarized light scattering by dielectric and metallic spheres on silicon wafers. Appl Opt 41 25 (2002) 5405-5412
16. Yang H.-N., Fang K., Lu T.-M., and Wang G.-C. Diffuse-light scattering study of Pb (1 1 0) surface-roughening. Phys Rev B 47 15 (1993) 842-847
17. Zhao Y.-P., Wu Y.-J., Yang H.-N., Wang G.-C., and Lu T.-M. In situ real-time study of chemical etching process of Si(1 0 0) using light scattering. Appl Phys Lett 69 (1996) 221-223
18. Pinnington T., Lavoie C., Tiedje T., Haveman B., and Nodwell E. Surface morphology dynamics in strained epitaxial In-GaAs. Phys Rev Lett 79 (1997) 1698-1701
19. Chason E., Sinclair M.B., Floro J.A., Hunter J.A., and Hwang R.Q. Spectroscopic light scattering for real-time measurements of thin film and surface evolution. Appl Phys Lett 72 (1998) 3276-3278
20. Ebothe J., Kityk I.V., Hichou A.E., Idrissi B.E., Addou M., and Krasowski J. Photoinduced second-harmonic generation in the indium tin oxide crystalline films. J Vac Sci Technol A 21 1 (2003) 201-205
21. van Nijnatten PA. Ph.D. thesis, Oxford Brookes University, 2002.
22. van Nijnatten PA. Renewable energy. In: Sayigh A, editor. Proceedings of world renewable energy congress VI; 2002.
23. van Nijnatten P.A. An automated directional reflectance/transmittance analyser for coating analysis. Thin Solid Films 442 (2003) 74-79
24. Detrio J.A. In: Proceedings of SPIE 1981, vol. 276. p. 136.
25. Lindstrom T., and Roos A. Reflectance and transmittance measurements of anisotropically scattering samples in focusing Coblentz spheres. Rev. Sci. Instrum. 71 6 (2000) 2270-2278
26. Vorburger T.V., Marx E., and Lettieri T.R. Regimes of surface roughness measurable with light scattering. Appl Opt 32 (1993) 3401-3408
27. Schuitema R., Metselaar W., and Zeman M. Light scattering at rough interfaces of thin film solar cells to improve the efficiency and stability. IEEE Proc RISC (1999) 399
28. Cochrane PT. Master of Science Thesis. University of Waikato; 1998.
29. Zeman M., van Swaaij R.A.C.M.M., Metselaar J.W., and Schropp R.E.I. Optical modeling of a-Si:H solar cells with rough interfaces: effect of back contact and interface roughness. J App Phys 88 11 (2000) 6436-6443
30. Carniglia C.K. Scalar scattering theory for multilayer optical coatings. Opt Eng 81 2 (1979) 104-115
31. Carniglia C.K., and Jensen D.G. Single-layer model for surface roughness. Appl Opt 41 16 (2002) 3167-3171
32. Singh U., Singh A., and Kapoor A. Homogeneous model for surface roughness in identical double layer system. Opt Laser Technol 39 (2007) 247-255
33. Glytsis B.N., and Gaylord T.K. Antireflection surface structure: dielectric layer(s) over a high spatial-frequency surface-relief grating on a lossy substrate. Appl Opt 27 20 (1998) 4288-4303
34. Vaši{dotless}̌ček A. Optics of thin films (1960), North Holland Publishing Company, Amsterdam
35. Carniglia CK, Jensen DG. The equivalence between surface roughness and an absorbing layer on the surface. OIC 7; 2001.
36. Weber M.F., Stover C.A., Gilbert L.R., Nevitt T.J., and Ouderkirk A.J. Science (2001) 287