Polarization of out-of-plane scattering from microrough silicon

Optics Letters

Volumn 22, Issue 17, 1997, Pages 1284-1286

  Germer, Thomas A ^a   Asmail, Clara C ^a   Scheer, Bradley W ^b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b VLSI Research Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001683938     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.22.001284     Document Type: Article

References (10)

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6. W. M. Bruno, J. A. Roth, P. E. Burke, W. B. Hewitt, R. E. Holmbeck, and D. G. Neal, Appl. Opt. 34, 1229 (1995).
7. C. C. Asmail, C. L. Cromer, J. E. Proctor, and J. J. Hsia, Proc. SPIE 2260, 52 (1994).
8. B. W. Scheer, Proc. SPIE 2862, 78 (1996).
9. E. D. Palik, Handbook of Optical Constants of Solids (Academic, San Diego, Calif., 1985).
10. T. A. Germer and C. C. Asmail, "Microroughness-blind hemispherical optical scatter instrument," provisional U.S. patent application filed (1997).