Large-angle in-plane light scattering from rough surfaces

Applied Optics

Volumn 39, Issue 25, 2000, Pages 4658-4668

  Karabacak, Tansel ^a   Zhao, Yiping ^a   Stowe, Matthew ^a   Quayle, Bill ^a   Wang, Gwo Ching ^a   Lu, Ton Ming ^a  

^a Rensselaer Polytechnic Institute   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COPPER; SILICON WAFERS; SURFACE ROUGHNESS; THIN FILMS; VECTORS;

SCATTERING MEASUREMENT;

LIGHT SCATTERING;

EID: 0038639651     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.39.004658     Document Type: Article

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