Angular dependence and polarization of out-of-plane optical scattering from particulate contamination, subsurface defects, and surface microroughness

Applied Optics

Volumn 36, Issue 33, 1997, Pages 8798-8805

  Germer, Thomas A ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Bidirectional reflectance distribution function; Microroughness; Particulate contamination; Polarimetry; Subsurface defects

Indexed keywords

CALCULATIONS; ELECTRIC FIELDS; IMPURITIES; LIGHT POLARIZATION; LIGHT REFLECTION; MATRIX ALGEBRA; OPTICAL VARIABLES MEASUREMENT; POLARIMETERS; REFRACTIVE INDEX; SURFACE ROUGHNESS;

BIDIRECTIONAL REFLECTANCE DISTRIBUTION FUNCTION; MICROROUGHNESS; PARTICULATE CONTAMINATION; SUBSURFACE DEFECTS;

LIGHT SCATTERING;

EID: 0031270344     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.008798     Document Type: Article

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