Scattering-reduction effect with overcoated rough surfaces: Theory and experiment

Applied Optics

Volumn 36, Issue 22, 1997, Pages 5574-5579

  Giovannini, H ^a   Amra, C ^a  

^a CNRS   (France)

Author keywords

Differential method; Optical coatings; Rough surfaces; Scattering; Thin films

Indexed keywords

EID: 0042951129     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.005574     Document Type: Article

References (25)

1. J. M. Bennett and L. Mattsson, Introduction to Surface Roughness and Scattering (Optical Society of America, Washington, D.C., 1989).
2. J. M. Elson, J. P. Rahn, and J. M. Bennett, “Light scattering from multilayer optics: comparison of theory and experiment, ” Appl. Opt. 19, 669-679 (1980).
3. P. Bousquet, F. Flory, and P. Roche, “Scattering from multilayer thin films: theory and experiment, ” J. Opt. Soc. Am. 9, 1115-1123 (1981).
4. J. M. Elson, J. P. Rahn, and J. M. Bennett, “Relationship of the total integrated scattering from multilayer-coated optics to angle of incidence, polarization, correlation-length, and roughness cross-correlation properties, ” Appl. Opt. 22, 3207-3219(1983).
5. C. Amra, “Light scattering from multilayer optics. Part A: Investigation tools, ” J. Opt. Soc. Am. A 11, 197-210 (1994).
6. C. Amra, “Light scattering from multilayer optics. Part B: application to experiment, ” J. Opt. Soc. Am. A 11, 211-226(1994).
7. A. Duparre and S. Kassam, “Relation between light scattering and microstructure of optical thin films, ” Appl. Opt. 32, 5475-5480 (1992).
8. S. Kassam, A. Duparre, K. Helm, P. Bussemer, and J. Neubert, “Light scattering from the volume of optical thin films: theory and experiment, ” Appl. Opt. 31, 1304-1313 (1992).
9. C. Amra, “From light scattering to the microstructure of thin film multilayers, ” Appl. Opt. 32, 5481-5491 (1993).
10. C. Amra, “First-order vector theory of bulk scattering in optical multilayers, ” J. Opt. Soc. Am. 10, 365-374 (1993).
11. C. Amra, C. Grèzes-Besset, and L. Bruel, “Comparison of surface and bulk scattering in optical coatings, ” Appl. Opt. 32, 5492-5503 (1993).
12. C. Amra, D. Torricini, and P. Roche, “Multiwavelength (0.4510.6 mm) angle-resolved scatterometer or how to extend the optical window, ” Appl. Opt. 32, 5462-5474 (1993).
13. C. Amra, J. H. Apfel, and E. Pelletier, “Role of interface correlation in light scattering by a multilayer, ” Appl. Opt. 31, 3134-3151 (1992).
14. S. Maure, G. Albrand, and C. Amra, “Low-level scattering and localized defects, ” Appl. Opt. 35, 5573-5582 (1996).
15. C. Deumie, R. Richier, P. Dumas, and C. Amra, “Multiscale roughness in optical multilayers: atomic force microscopy and light scattering, ” Appl. Opt. 35, 5583-5594 (1996).
16. C. Deumie, H. Giovannini, and C. Amra, “Ellipsometry of light scattering from multilayer coatings, ” Appl. Opt. 35, 5600-5608 (1996).
17. P. Vincent, “Differential methods, ” in Progress in Optics, E. Wolf, ed. (Springer-Verlag, Berlin, 1980), Vol. 22, pp. 101-121.
18. F. Montiel and M. Neviere, “Differential theory of gratings: extension to deep gratings of arbitrary profile and permittivity through the R-matrix algorithm, ” J. Opt. Soc. Am. A 11, 3241-3250 (1994).
19. M. Saillard and D. Maystre, “Scattering from metallic and dielectric rough surfaces, ” J. Opt. Soc. Am. A 7, 982-990 (1990).
20. A. A. Maradudin, T. Michel, A. R. McGurn, and E. R. Mendez, “Enhanced backscattering of light from a random grating, ” Ann. Phys. 203, 255-276 (1990).
21. M. Nieto-Vesperinas, Scattering and Diffraction in Physical Optics (Wiley, New York, 1991), pp. 232-289.
22. M. G. Moharam and T. K. Gaylord, “Rigorous coupled-wave analysis of metallic surface relief gratings, ” J. Opt. Soc. Am. A3, 1780-1787 (1986).
23. J. P. Hugonin and R. Petit, “A numerical study of the problem of diffraction at a non-periodic obstacle, ” Opt. Commun. 20, 360-364 (1977).
24. L. Li, “Formulation and comparison of two recursive matrix algorithms for modeling layered diffraction gratings, ” J. Opt. Soc. Am. A 13, 1024-1035 (1996).
25. C. Amra, G. Albrand, and P. Roche, “Theory and application of antiscattering single layers: antiscattering antireflection scoatings, ” Appl. Opt. 16, 2695-2702 (1986).