In situ observation of oxygen gettering by titanium overlayer on Hf O2 Si O2 Si using high-resolution Rutherford backscattering spectroscopy

Journal of Applied Physics

Volumn 102, Issue 6, 2007, Pages

  Nakajima, Kaoru ^a   Fujiyoshi, Akira ^a   Ming, Zhao ^a   Suzuki, Motofumi ^a   Kimura, Kenji ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; OXYGEN; RUTHERFORD BACKSCATTERING SPECTROSCOPY; TITANIUM COMPOUNDS;

HIGH RESOLUTION RUTHERFORD BACKSCATTERING SPECTROSCOPY; OXYGEN DEPLETION; OXYGEN GETTERING;

GETTERS;

EID: 34848817667     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2777107     Document Type: Article

References (11)

1. G. Lucovsky, Y. Wu, H. Niimi, V. Misra, and J. C. Philips, Appl. Phys. Lett. 74, 2005 (1999).
2. A. Fissel, H. J. Osten, and E. Bugiel, J. Vac. Sci. Technol. B 21, 1765 (2003).
3. G. D. Wilk, R. M. Wallace, and J. M. Anthony, J. Appl. Phys. 89, 5243 (2001).
4. A. Callegari, E. Cartier, M. Gribelyuk, H. F. Okom-Schmidt, and T. Zabel, J. Appl. Phys. 90, 6466 (2001).
5. M. Copel, E. Cartier, and T. M. Ross, Appl. Phys. Lett. 78, 1607 (2001).
6. H. Kim, P. C. McIntyre, C. O. Chui, K. C. Saraswat, and S. Stemmer, J. Appl. Phys. 96, 3467 (2004).
7. S. Kamiyama, T. Miura, and Y. Nara, Appl. Phys. Lett. 87, 132904 (2005).
8. K. Kimura, S. Joumori, Y. Oota, K. Nakajima, and M. Suzuki, Nucl. Instrum. Methods Phys. Res. B 219-220, 351 (2004).
9. M. Hansen, Constitution of Binary Alloys (McGraw-Hill, New York, 1958), p. 1069.
10. K.-I. Seo, D.-I. Lee, P. Pianetta, H. Kim, K. C. Saraswat, and P. C. McIntyre, Appl. Phys. Lett. 89, 142912 (2006).
11. L. V. Goncharova, M. Dalponte, T. Gustafsson, O. Celik, E. Garfunkel, P. S. Lysaght, and G. Berauker, J. Vac. Sci. Technol. A 25, 261 (2007).