Nanofluidic flowmeter using carbon sensing element

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 322-325

  Mizuno, Yoshihiro ^a,b   Liger, Matthieu ^b   Tai, Yu Chong ^b  

^a FUJITSU LABORATORIES LTD   (Japan)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; ETCHING; FLOW CONTROL; MEDICAL APPLICATIONS; MICROELECTROMECHANICAL DEVICES; SENSORS; THERMAL EFFECTS; VOLUMETRIC ANALYSIS;

CARBON SENSING ELEMENTS; FLOW MEASUREMENTS; FLOW SENSORS; MICROCHANNELS;

NANOTECHNOLOGY;

EID: 3042739516     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. S. Wu, Q. Lin, Y. Yuan, Y.-C. Tai, "MEMS flow sensors for nano-fluidic applications", Sensors and Actuators A: Physical, 89, pp. 152-158, 2001.
2. M. Ritcher, M. Wackerle, P. Woias, B. Hillerich, "Anovel flow sensor with high time resolution based on differential pressure principle", Proceedings of the International Conference on Micro Electro Mechanical Systems(MEMS'99), pp. 118-123, 1999.
3. J. Xie, J. Shih, Y.-C. Tai, "Integrated surface-micromachined mass flow controller", Proceedings of the International Conference on Micro Electro Mechanical Systems(MEMS'03), pp. 20-23, 2003.
4. E. Meng, Ph.D. thesis, Electrical Engineering, California Institute of Technology, 2003.