CMOS-compatible device for fluid density measurements fabricated by sacrificial aluminum etching

Sensors and Actuators, A: Physical

Volumn 73, Issue 3, 1999, Pages 243-251

  Westberg, David ^a   Paul, Oliver ^b   Andersson, Gert I ^a   Baltes, Henry ^a  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^b ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; APPROXIMATION THEORY; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; DENSITY MEASUREMENT (SPECIFIC GRAVITY); ETCHING; FINITE ELEMENT METHOD; MICROMACHINING; SEMICONDUCTING SILICON; TUBES (COMPONENTS);

SACRIFICIAL ALUMINUM ETCHING;

MICROSENSORS;

EID: 0032667556     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00225-8     Document Type: Article

References (9)

1. Anton Paar Sales Brochure, Austria, 1996.
2. P. Enoksson, G. Stemme, E. Stemme, Vibration Mode Investigation of a Resonant Silicon Tube Structure for Use as a Fluid Density Sensor, Proc. IEEE Micro Electro Mechanical Systems, Amsterdam, Netherlands, 29 Jan.-2 Feb., 1995, p. 133.
3. Enoksson P., Stemme G., Stemme E. Fluid density sensor based on resonance vibration. Sensors and Actuators A. 47:1995;327-331.
4. P. Enoksson, G. Stemme, E. Stemme, Silicon Tube Structures for a Fluid Density Sensor, Tech. Digest, 8th Int. Conf. Solid-StateSensors and Actuators (Transducers '95), Stockholm, Sweden, 25-29 June, 1995, p. 540.
5. Westberg D., Paul O., Baltes H. Surface micromachining by sacrificial aluminium etching. J. Micromech. Microeng. 6:1996;376.
6. Stemme E., Ekelöf J., Nordin L. Measuring liquid density with a tuning-fork transducer. IEEE Trans. Instrum. Meas. 32:1983;434.
7. D. Jaeggi, Thermal Converters by CMOS Technology, PhD thesis ETH Zürich No. 11567, 1996.
8. Paul O., Baltes H. Novel fully CMOS-compatible vacuum sensor. Sensors and Actuators A. 46-47:1995;143-146.
9. Blom F., Bouwstra S., Elwenspoek M., Fluitman J. Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry. J. Vac. Sci. Technol. B. 10:1992;19-26.