Angled exposure method for pattering on three-dimensional structures

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 9 B, 2007, Pages 6449-6453

  Singh, Vijay Kumar ^a   Sasaki, Minoru ^a   Hane, Kazuhiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Angled exposure; Polarized light; Reflection; Spray coating; Three dimensional photolithography

Indexed keywords

ANISOTROPIC ETCHING; LIGHT POLARIZATION; PATTERN RECOGNITION; PHOTOLITHOGRAPHY; THREE DIMENSIONAL;

ANGLED EXPOSURE; NARROW CAVITIES; SPRAY COATING;

MICROELECTROMECHANICAL DEVICES;

EID: 34648826752     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.6449     Document Type: Article

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