Patterning of silicon by indentation and chemical etching

Applied Physics Letters

Volumn 91, Issue 12, 2007, Pages

  Rao, R ^a   Bradby, J E ^a   Williams, J S ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

INDENTATION; PHASE TRANSITIONS; WET ETCHING;

NANOSCALE PATTERNING;

SILICON;

EID: 34648820385     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2779111     Document Type: Article

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