Smoothing of diamond-turned copper surfaces using ion beams with aid of planarizing film

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 9 A, 2007, Pages 6071-6073

  Frost, Frank ^a   Takino, Hideo ^b   Fechner, Renate ^a   Schindler, Axel ^a   Ohi, Namiko ^b   Nomura, Kazushi ^b  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^b NIKON CORPORATION   (Japan)

Author keywords

Copper; Diamond turning; Ion beam; Metal; Smoothing

Indexed keywords

COPPER; DIAMOND CUTTING TOOLS; ETCHING; PHOTORESISTORS; SINGLE CRYSTALS;

DIAMOND TURNING; ION BEAM PROCESS; MIRROR SURFACES;

ION BEAMS;

EID: 34548715910     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.6071     Document Type: Article

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