The effects of hydrogen plasma pretreatment on the formation of vertically aligned carbon nanotubes

Applied Surface Science

Volumn 253, Issue 23, 2007, Pages 9248-9253

  Wang, Wen Pin ^a   Wen, Hua Chiang ^a   Jian, Sheng Rui ^a   Juang, Jenh Yih ^a,b   Lai, Yi Shao ^c   Tsai, Chien Huang ^d   Wu, Wen Fa ^e   Chen, Kuan Ting ^a   Chou, Chang Pin ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN NORMAL UNIVERSITY   (Taiwan)

^c ADVANCED SEMICONDUCTOR ENGINEERING INC   (Taiwan)

^d NAN KAI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^e NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

Author keywords

Carbon nanotubes; H 2 pretreatment; Raman spectroscopy; Scanning electron microscopy; Transmission electron microscopy

Indexed keywords

AMORPHOUS CARBON; CRYSTAL GROWTH; FLOW RATE; HYDROGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

CARBONACEOUS PARTICLES; HYDROGEN PLASMA PRETREATMENT;

CARBON NANOTUBES;

EID: 34548317177     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.05.060     Document Type: Article

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