Growth of carbon nanotubes with anodic aluminum oxide formed on the catalytic metal-coated Si substrate

Diamond and Related Materials

Volumn 12, Issue 3-7, 2003, Pages 870-873

  Kim, Mun Ja ^a   Lee, Tae Young ^a   Choi, Jong Hyong ^a   Park, Jong Bae ^a   Seung Lee, Jin ^a   Kim, Seong Kyu ^a   Yoo, Ji Beom ^a   Park, Chong Yun ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

AAO Si; Anodic aluminum oxide (AAO); Carbon nanotubes, PECVD

Indexed keywords

ALUMINA; ANODIC OXIDATION; CATALYSIS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POROUS MATERIALS; SILICON; SUBSTRATES;

POROUS ALUMINA TEMPLATES;

CARBON NANOTUBES;

DIAMOND;

EID: 0038522734     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(02)00364-3     Document Type: Article

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