Effect of hydrogen plasma pretreatment on growth of carbon nanotubes by MPECVD

Materials Science and Engineering C

Volumn 26, Issue 5-7, 2006, Pages 1211-1214

  Choi, Won Seok ^a   Choi, Sung Hun ^b   Hong, Byungyou ^a   Lim, Dong Gun ^c   Yang, Kea Joon ^c   Lee, Jae Hyeoung ^b  

^a Sungkyunkwan University   (South Korea)

^b Kunsan National University   (South Korea)

^c Chungju National University   (South Korea)

Author keywords

Carbon nanotube; Catalyst layer pretreatment; Microwave plasma enhanced chemical vapor deposition

Indexed keywords

CATALYSTS; CHEMICAL VAPOR DEPOSITION; MAGNETRON SPUTTERING; METHANE; PLASMAS; SCANNING ELECTRON MICROSCOPY;

CATALYST LAYER PRETREATMENT; HYDROGEN PLASMA; MICROWAVE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; NI CATALYTIC LAYER;

CARBON NANOTUBES;

EID: 33646826141     PISSN: 09284931     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msec.2005.09.037     Document Type: Article

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