An electric impedance based microelectromechanical system flow sensor for ionic solutions

Measurement Science and Technology

Volumn 14, Issue 8, 2003, Pages 1321-1327

  Ayliffe, H Edward ^a   Rabbitt, R D ^a  

^a University of Utah   (United States)

Author keywords

Conductivity; Diffusion layer; Electric impedance; Electrochemical; Electrochemistry; Electrolyte; Flow; Ionic solutions; MEMS; Microelectrode; Microflow; Microfluidics; Sensor

Indexed keywords

ELECTRIC IMPEDANCE; MICROELECTRODES; SENSORS; STATISTICAL METHODS;

IONIC SOLUTIONS;

MICROELECTROMECHANICAL DEVICES;

ELECTROCHEMISTRY; FLOW MEASUREMENT; MICROELECTROMECHANICAL SYSTEM; SENSOR;

EID: 0041417858     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/14/8/318     Document Type: Article

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