Characterization of a dipole surface drive actuator with large travel and force

Journal of Microelectromechanical Systems

Volumn 15, Issue 6, 2006, Pages 1726-1734

  Agarwal, Manu ^a   Dutton, David T ^a   Theil, Jeremy A ^a   Bai, Qing ^a   Par, Evelyn ^a   Hoen, Storrs ^a  

^a AGILENT LABORATORIES   (United States)

Author keywords

2 D actuator; Actuator; Air operation; Capacitive sensing; Dipole; Electrostatic; Electrostatic snap in; Fringing field forces; Microactuator; Micromachining; Micromover; Nanopositioner; Position sensing; Surface actuator; Surface drive

Indexed keywords

CHARACTERIZATION; MICROACTUATORS; MICROMACHINING; MICROSENSORS; NANOTECHNOLOGY;

CAPACITIVE SENSING; DIPOLE SURFACE DRIVE ACTUATOR; FRINGING FIELD FORCES; MILLIACTUATORS; POSITION SENSING;

ELECTROSTATIC ACTUATORS;

EID: 33845515271     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.883886     Document Type: Article

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