Effect of substrate temperature on HWCVD deposited a-SiC:H film

Materials Letters

Volumn 61, Issue 25, 2007, Pages 4731-4734

  Swain, Bibhu P ^a   Dusane, Rajiv O ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

Author keywords

a SiC:H; FTIR; HWCVD; Photoluminescence; Raman

Indexed keywords

CARBON; CHEMICAL VAPOR DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PHOTOLUMINESCENCE; SILICON COMPOUNDS;

HOT WIRE CHEMICAL VAPOR DEPOSITION (HWCVD); HYDROGEN DILUTION; NETWORK PROPERTIES; SUBSTRATE TEMPERATURE;

AMORPHOUS FILMS;

EID: 34548126966     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2007.03.029     Document Type: Article

References (18)

1. Swain B.P. Surf. Coat. Techno. 201 (2006) 1589
2. Swain B.P. Surf. Coat. Techno. 201 (2006) 1132
3. Swain B.P., and Dusane R.O. Microelec. Engg. 83 (2006) 55
4. Swain B.P., Rao T.K.G., and Dusane R.O. J. Non-cryst. Solids, 352 (2006) 1416
5. Swain B.P. Appl. Surf. Sci. 253 (2006) 2310
6. Kumbhar A., Patil S.B., Kumar S., Lal R., and Dusane R.O. Thin Solid Films 395 (2001) 244
7. Patil S.B., Kumbhar A.A., Saraswat S., and Dusane R.O. Thin Solid Films 430 (2003) 257
8. Ray P.P., Chaudhuri P., and Chatterjee P. Thin Solid Films 403-404 (2002) 275
9. Swain B.P., Patil S.B., Kumbhar A., and Dusane R.O. Thin Solid Films 430 (2003) 186
10. Patil S.B., Vairagar A.V., Kumbhar A.A., Sahu L.K., Rao V.R., Venkatramani N., Dusane R.O., and Schroeder B. Thin Solid Films 430 (2003) 63
11. Waghmare P.C., Patil S.B., Kumbhar A.A., Rao R., and Dusane R.O. Thin Solid Films 430 (2003) 189
12. Patil S.B., Kumbhar A.A., Saraswat S., and Dusane R.O. Thin Solid Films 430 (2003) 257
13. Mahan A.H., Carapella J., Nelson B.P., Crandall R.S., and Balberg I. J. Appl. Phys. 69 (1991) 6728
14. Honda N., Masuda A., and Matsumura H. J. Non-Cryst. Solids 266-269 (2000) 100
15. Yoon S.F., Yang H., Rusli, Ahn J., Zhang Q., and Poo T.L. Diamond Relat. Mater. 6 (1997) 1683
16. Von. Keudell A., Moller W., and Hytry R. Appl. Phys. Lett. 62 (1993) 937
17. Capote G., Prioli R., Jardim P.M., Zanatta A.R., Jacobsohn L.G., and Freire Jr. F.L. J. Non-Cryst. Solids 338-340 (2004) 503
18. Jadkar S.R., Sali J.V., Kshirsagar S.T., and Takwale M.G. J. Non-Cryst. Solids 299-302 (2002) 168