Amorphous hydrogenated carbon films deposited by PECVD: Influence of the substrate temperature on film growth and microstructure

Journal of Non-Crystalline Solids

Volumn 338-340, Issue 1 SPEC. ISS., 2004, Pages 503-508

  Capote, G ^a   Prioli, R ^a   Jardim, P M ^a   Zanatta, A R ^b   Jacobsohn, L G ^c   Freire Jr , F L ^a  

^a PONTIFICAL CATHOLIC UNIVERSITY OF RIO DE JANEIRO   (Brazil)

^b UNIVERSITY OF SÃO PAULO   (Brazil)

^c LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ATOMIC FORCE MICROSCOPY; CARBON; ELECTRIC POTENTIAL; FILM GROWTH; HIGH TEMPERATURE EFFECTS; HYDROGENATION; ION BOMBARDMENT; METHANE; MICROSTRUCTURE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYMERS; RAMAN SPECTROSCOPY; STRESS ANALYSIS; SURFACE ROUGHNESS;

HYDROGEN DILUTION; SUBSTRATE TEMPERATURE; SURFACE MOBILITY;

AMORPHOUS FILMS;

EID: 2942587017     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2004.03.029     Document Type: Conference Paper

References (15)

1. Robertson J. Prog. Solid State Chem. 21:1991;199.
2. Riccardi C., Barni R., Fontanesi M., Tosi P. Chem. Phys. Lett. 329:2000;66.
3. Jacobsohn L.G., Capote G., Cruz N.C., Zanatta A.R., Freire F.L. Jr. Thin Solid Films. 419:2002;46.
4. Sun Z., Lin C.H., Lee Y.L., Shi J.R., Tay B.K., Shi X. J. Appl. Phys. 87:2000;8122.
5. Tomasella E., Meunier C., Mikhailov S. Surf. Coat. Technol. 141(286):2001;286.
6. Valentini L., Kenny J.M., Mariotto G., Tosi P., Carlotti G., Socino G., Lozzi L., Santuci S. J. Vac. Sci. Technol. A. 19:2001;1611.
7. Valentini L., Kenny J.M., Carlotti G., Socino G., Lozzi L., Santuci S. J. Appl. Phys. 89:2001;1003.
8. von Keudell A., Möller W., Hytry R. Appl. Phys. Lett. 62:1993;937.
9. Mutsukura N., Saitoh K. J. Vac. Sci. Technol. A. 14:1996;2666.
10. Jacobsohn L.G., Freire F.L. Jr. J. Vac. Sci. Technol. A. 17:1999;2841.
11. Oliver W.C., Pharr G.M. J. Mater. Res. 7:1992;1564.
12. Coufal H., Winters H.F., Bay H.L., Eckstein W. Phys. Rev. B. 44:1991;4747.
13. Mariotto G., Achete C.A., Freire F.L. Jr. Thin Solid Films. 241:1994;255.
14. Jacobsohn L.G., Franceschini D.F., Maia da Costa M.E.H., Freire F.L. Jr. J. Vac. Sci. Technol. A. 18:2000;2230.
15. Lacerda R.G., Marques F.C., Freire F.L. Jr. Diamond Relat. Mater. 8:1999;495.