Ionic-liquid lubrication of sliding MEMS contacts: Comparison of AFM liquid cell and device-level tests

Journal of Microelectromechanical Systems

Volumn 16, Issue 4, 2007, Pages 836-843

  Nainaparampil, Josekutty J ^a   Eapen, Kalathil C ^b   Sanders, Jeffrey H ^c   Voevodin, Andrey A ^d  

^a UES INC   (United States)

^b UNIVERSITY OF DAYTON RESEARCH INSTITUTE   (United States)

^c WRIGHT PATTERSON AIR FORCE BASE   (United States)

^d AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

Atomic force microscopy (AFM); Boundary lubrication; Ionic liquid (IL); Microelectromechanical system (MEMS)

Indexed keywords

ATOMIC FORCE MICROSCOPY; CONTACTS (FLUID MECHANICS); FRICTION; IONIC LIQUIDS; LUBRICATION; WEAR OF MATERIALS;

ETHYL METHYL IMIDAZOLIUM; ETHYL METHYL PYRIDINIUM;

MEMS;

EID: 34548025337     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.901628     Document Type: Article

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