Anti-stiction coatings for surface micromachines

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3511, Issue , 1998, Pages 108-113

  Maboudian, Roya ^a  

^a University of California   (United States)

Author keywords

Adhesion; Friction; MEMS; Stiction

Indexed keywords

ADHESION; COATINGS; ENCAPSULATION; HYDROGEN; INTEGRATED CIRCUIT LAYOUT; MICROMACHINING; PASSIVATION; POLYSILICON; STICTION; SURFACE TENSION; SURFACE TREATMENT; WEAR OF MATERIALS;

ANTISTICTION COATINGS; HYDROGEN TERMINATING TREATMENTS; SURFACE MICROSTRUCTURE;

MICROELECTROMECHANICAL DEVICES;

EID: 0038814316     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.324288     Document Type: Conference Paper

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