Novel fabrication of a pressure sensor with polymer material and evaluation of its performance

Journal of Micromechanics and Microengineering

Volumn 17, Issue 8, 2007, Pages 1640-1648

  Ko, H S ^a   Liu, C W ^b   Gau, C ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DIAPHRAGMS; HIGH TEMPERATURE OPERATIONS; MICROFABRICATION; ORGANIC POLYMERS; PIEZOELECTRIC DEVICES; SPIN COATING;

POLYMER MATERIALS; SENSOR CAVITY; SENSOR DIAPHRAGM; SENSOR MATERIALS;

PRESSURE SENSORS;

EID: 34547689221     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/8/030     Document Type: Article

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