SU-8 waveguiding interferometric micro-sensor for gage pressure measurement

Sensors and Actuators, A: Physical

Volumn 135, Issue 1, 2007, Pages 179-184

  Pelletier, N ^a   Beche B ^b   Tahani, N ^a   Zyss, J ^c   Camberlein, L ^a   Gaviot, E ^a  

^a UNIVERSITÉ DU MAINE   (France)

^b CNRS   (France)

^c LABORATOIRE DE PHOTONIQUE QUANTIQUE ET MOLÉCULAIRE   (France)

Author keywords

Gage pressure sensor; Integrated optics; Mach Zehnder interferometer; Micromachined membrane; Microtechnologies; Optical sensor; SU 8 polymer

Indexed keywords

FINITE ELEMENT METHOD; INTEGRATED OPTICS; MACH-ZEHNDER INTERFEROMETERS; MATHEMATICAL MODELS; OPTICAL SENSORS; OPTICAL WAVEGUIDES;

GAGE PRESSURE SENSORS; MICROMACHINED MEMBRANES; MICROTECHNOLOGIES;

PRESSURE MEASUREMENT;

EID: 33947317102     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.07.012     Document Type: Article

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