Fast psychrometers as new SU-8 based microsystems

IEEE Transactions on Instrumentation and Measurement

Volumn 56, Issue 1, 2007, Pages 102-106

  Giordani, Nicolas ^a   Camberlein, L ^a   Gaviot, E ^a   Polet, F ^a   Pelletier, N ^a   Beche B ^b  

^a UNIVERSITÉ DU MAINE   (France)

^b INSTITUT DES MATÉRIAUX JEAN ROUXEL   (France)

Author keywords

Humidity; Microfluidics; Polymers; Psychrometers; Thermal microsensors

Indexed keywords

ATMOSPHERIC HUMIDITY; MEMS; MICROCHANNELS; MICROFLUIDICS; MICROSYSTEMS; THERMOPILES;

SEEBECK VOLTAGE; SIGNAL CONDITIONER; THERMAL MICROSENSORS;

PSYCHROMETERS;

EID: 33847663835     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIM.2006.887332     Document Type: Article

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