Tilting micromirror with a liquid-metal pivot

Journal of Microelectromechanical Systems

Volumn 15, Issue 6, 2006, Pages 1568-1575

  Zeng, Hongjun ^a   Wan, Zhiliang ^a   Feinerman, Alan D ^a  

^a 1120 Science and Engineering Offices   (United States)

Author keywords

Liquid metal pivot; Microactuator; Microelectromechanical systems (MEMS); Micromirror; Microoptoelectromechanical systems (MOEMS)

Indexed keywords

LIQUID METALS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROOPTICS; NATURAL FREQUENCIES; TORQUE;

LIQUID-METAL PIVOT; MICROMIRROR; MICROOPTOELECTROMECHANICAL SYSTEMS;

MIRRORS;

EID: 33845543659     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.883531     Document Type: Article

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