A micro-machined safety valve for power applications with improved sealing

Journal of Micromechanics and Microengineering

Volumn 16, Issue 9, 2006, Pages

  Debray, A ^a   Nakakubo, T ^a   Yokoi, A ^a   Mogi, S ^a   Ueda, K ^a   Shibata, M ^a   Takeuchi, S ^b   Fujita, H ^b  

^a CANON INC   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FLOW OF FLUIDS; FLUOROCARBONS; FUEL CELLS; GASKETS; HYDROGEN FUELS; MAGNETIC LEAKAGE; NOZZLES; PLASTIC FILMS; SEALS;

MICRO-MACHINED; PARYLENE FILMS; POWER APPLICATIONS; SEALING PROPERTIES;

SAFETY VALVES;

EID: 33747324756     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/9/S11     Document Type: Article

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