Geometrical characterization of micro-holes drilled in glass by gravity-feed with spark assisted chemical engraving (SACE)

Journal of Micromechanics and Microengineering

Volumn 17, Issue 7, 2007, Pages 1343-1349

  Maillard, P ^a   Despont, B ^a   Bleuler, H ^a   Wuthrich R ^b  

^a EPFL   (Switzerland)

^b Gina Cody School of Engineering and Computer Science   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL GEOMETRY; ELECTRIC DISCHARGES; GLASS MANUFACTURE; MICROMACHINING;

DRILLING DEPTH; ELECTROCHEMICAL DISCHARGES; GLASS PROCESSING; SPARK ASSISTED CHEMICAL ENGRAVING;

MICROMECHANICS;

EID: 34547597229     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/7/017     Document Type: Article

References (24)

1. Wüthrich R and Fascio V 2005 Machining of non-conductive materials using electrochemical discharge phenomenon-an overview Int. J. Mach. Tools Manuf. 45 1095-108
2. Kulkarni A, Sharan R and Lal G K 2003 Measurement of temperature transients in the electrochemical discharge machining process Temperature: Its Measurement and Control in Science and Industry, AIP Conf. Proc. 684 1069-74
3. Kurafuji H and Suda K 1968 Electrical discharge drilling of glass Ann. CIRP 16 415-9
4. Esashi M, Matsumoto Y and Shoji S 1990 Absolute pressure sensors by air-tight electrical feedthrough structure Sensors Actuators A21-A23 1048-52
5. Guérin L J, Dubochet O, Zeberli J F, Clot P and Renaud Ph 1998 Miniature one-shot valve Micro Electro Mechanical Systems-IEEE 11th Ann. Int. Workshop Proc. pp 425-8
6. Daridon A, Fascio V, Lichtenberg J, Wüthrich R, Langen H, Verpoorte E and De Rooij N F 2001 Multi-layer microfluidic glass chips for microanalytical applications Fresenius J. Anal. Chem. 371 261-9
7. Lee E S, Howard D, Liang E, Collins S D and Smith R L 2004 Removable tubing interconnects for glass-based micro-fluidic systems made using ECDM J. Micromech. Microeng. 14 535-41
8. Cook N H, Foote G B, Jordan P and Kalyani B N 1972 Experimental studies in electro-machining ASME Paper 72-WA/Prod-21
9. Jain V K, Rao P S, Choudhury S K and Rajurkar K P 1991 Experimental investigations into travelling wire electrochemical spark machining (TW-ECSM) of composites Trans. ASME J. Eng. Ind. 113 75-84
10. Tsutsumi C, Okano K and Suto T 1993 High quality machining of ceramics J. Mater. Process. Technol. 37 639-54
11. Singh Y P, Jain V K, Kumar P and Agrawal D C 1996 Machining piezoelectric (PZT) ceramics using an electrochemical spark machining (ECSM) process J. Mater. Process. Technol. 58 24-31
12. Basak I and Ghosh A 1996 Mechanism of spark generation during electrochemical discharge machining: a theoretical model and experimental verification J. Mater. Process. Technol. 62 46-53
13. Bhattacharyya B, Doloi B N and Sorkhel S K 1999 Experimental investigations into electrochemical discharge machining (ECDM) of non-conductive ceramic materials J. Mater. Process. Technol. 95 145-54
14. Jain V K and Chak S K 2000 Electrochemical spark trepanning of alumina and quartz Mach. Sci. Technol. 4 277-90
15. Jain V K, Choudhury S K and Ramesh K M 2002 On the machining of alumina and glass Int. J. Mach. Tools Manuf. 42 1269-76
16. Wüthrich R, Fujisaki K, Couthy Ph, Hof L A and Bleuler H 2005 Spark assisted chemical engraving (SACE) in microfactory J. Micromech. Microeng. 15 276-80
17. Liao Y S and Peng W Y 2006 Study on hole-machining on Pyrex wafer by electrochemical discharge machining (ECDM) Mater. Sci. Forum 505-507 1207-12
18. Wüthrich R, Spaelter U, Wu Y and Bleuler H 2006 A systematic characterisation method for gravity feed micro-hole drilling in glass with Spark Assisted Chemical Engraving (SACE) J. Micromech. Microeng. 16 1891-96
19. Kim D J, Ahn Y, Lee S H and Kim Y K 2006 Voltage pulse frequency and duty ratio effects in an electrochemical discharge microdrilling process of Pyrex glass Int. J. Mach. Tools Manuf. 46 1064-7
20. Zheng Z P, Su H C, Huang F Y and Yan B H 2007 The tool geometrical shape and pulse-off time of pulse voltage effects in a Pyrex glass electrochemical discharge microdrilling process J. Micromech. Microeng. 17 265-72
21. Wüthrich R, Spaetler U and Bleuler H 2006 The current signal in Spark Assisted Chemical Engraving (SACE), what does it tell us? J. Micromech. Microeng. 16 779-85
22. Wüthrich R and Hof L A 2006 The gas film in Spark Assisted Chemical Engraving (SACE)-a key element for micro-machining applications Int. J. Mach. Tools Manuf. 46 828-35
23. Wüthrich R 2003 Spark Assisted Chemical Engraving-a stochastic modeling approach Dissertation Thesis 2776 Swiss Federal Institute of Technology, EPF Lausanne
24. Fascio V, Wüthrich R and Bleuler H 2004 Spark assisted chemical engraving in the light of electrochemistry Electrochim. Acta 49 3997-4003