A systematic characterization method for gravity-feed micro-hole drilling in glass with spark assisted chemical engraving (SACE)

Journal of Micromechanics and Microengineering

Volumn 16, Issue 9, 2006, Pages 1891-1896

  Wuthrich R ^a   Spaelter, U ^a   Wu, Y ^b   Bleuler, H ^a  

^a EPFL   (Switzerland)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DRILLING; ELECTROLYTES; FILMS; GASES; GLASS;

DRILLING SPEED; HYDRODYNAMIC REGIME; MICRO-HOLES; SPARK ASSISTED CHEMICAL ENGRAVING (SACE);

COMPOSITE MICROMECHANICS;

EID: 33747241971     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/9/019     Document Type: Article

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