The gas film in spark assisted chemical engraving (SACE) - A key element for micro-machining applications

International Journal of Machine Tools and Manufacture

Volumn 46, Issue 7-8, 2006, Pages 828-835

  Wuthrich R ^a   Hof, L A ^b  

^a EPFL   (Switzerland)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Electrochemical discharge phenomena; Gas bubble evolution; Glass micro machining; Spark assisted chemical engraving (SACE)

Indexed keywords

BUBBLES (IN FLUIDS); CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC DISCHARGES; ELECTRODES; MATHEMATICAL MODELS; SURFACE PROPERTIES;

ELECTROCHEMICAL DISCHARGE PHENOMENA; GAS BUBBLE EVOLUTION; GLASS MICRO-MACHINING; SPARK ASSISTED CHEMICAL ENGRAVING (SACE);

MICROMACHINING;

EID: 33645078444     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmachtools.2005.07.029     Document Type: Article

References (27)

1. R. Wüthrich, and V. Fascio Machining of non-conductive materials using electrochemical discharge phenomenon - An overview International Journal of Machine Tools and Manufacture 45 2005 1095 1108
2. H. Kurafuji, and K. Suda Electrical discharge drilling of glass Annals of the CIRP 16 1968 415 419
3. M. Esashi, Y. Matsumoto, and S. Shoji Absolute pressure sensors by air-tight electrical feedthrough structure Sensors and Actuators A21-A23 1990 1048 1052
4. L.J. Guérin, O. Dubochet, J.F. Zeberli, P. Clot, and Ph. Renaud Miniature one-shot valve Micro electro mechanical systems - IEEE eleventh annual international workshop proceedings 1998 425 428
5. A. Daridon, V. Fascio, J. Lichtenberg, R. Wüthrich, H. Langen, E. Verpoorte, and N.F. De Rooij Multi-layer Microfluidic Glass Chips for Microanalytical Applications Fresenius Journal of Analysis Chemistry 371 2001 261 269
6. E.S. Lee, D. Howard, E. Liang, S.D. Collins, and R.L. Smith Removable tubing interconnects for glass-based micro-fluidic systems made using ECDM Journal of Micromechanics and Microengineering 14 2004 535 541
7. V. Fascio, R. Wüthrich, D. Viquerat, and H. Langen 3D Microstructuring of Glass using Electrochemical Discharge Machining (ECDM) International Symposium on Michromechatronics and Human Science (MHS'99) 1999 179 183
8. L.A. Hof, A. Lal, K. Fujisaki, R. Wüthrich, H.H. Langen, and H. Bleuler 3D Micro structuring of glass with an AFM The 4th EUSPEN International Conference, may 30th-3rd June 2004, Glassgow, UK, 98-99 2004
9. R. Wüthrich, L.A. Hof, A. Lal, K. Fujisaki, H. Bleuler, Ph. Mandin, G. Picard, Physical principles and miniaturization of Spark Assisted Chemical Engraving (SACE), Journal of Micromechanics and Microengineering, in press.
10. L.A. Hof 3D-Microstructuring of glass Master Thesis, TU Delft (2004), The Netherlands.
11. H.H. Kellogg Anode effect in aqueous electrolysis Journal of Electrochemical Society 97 1950 133 142
12. I. Basak, and A. Ghosh Mechanism of spark generation during electrochemical discharge machining: a theoretical model and experimental verification Journal of Material Processing Technology 62 1996 46 53
13. V. Fascio, H.H. Langen, H. Bleuler, and Ch. Comninellis Investigations of the spark assisted chemical engraving Electrochemistry Communications 5 2003 203 207
14. H. Fizeau, L. Foucault, Ann. de Chimie et de Physique XI 3ème série (1844) 370.
15. B. Mazza, P. Pedeferri, and G. Re Hydrodynamic instabilities in electrolytic gas evolution Electrochimica Acta 23 1978 87 93
16. J. Garbarz-Olivier, and Ch. Guilpin The origin of the electrode effect in various electrolytes Journal of Electroanalytical Chemistry 91 1978 79 91
17. K. Arndt, and H. Probst Z. Elektrochemie 29 1923 323
18. R. Wüthrich: Spark Assisted Chemical Engraving - A Stochastic Modeling Approach, Dissertation Thesis (2776) Swiss Federal Institute of Technology, EPF Lausanne (2003).
19. R. Wüthrich, V. Fascio, and H. Bleuler A Stochastic Model for Electrode Effects Electrochimica Acta 49 2004 4005 4010
20. R. Wüthrich, and H. Bleuler A Model for Electrode Effects using Percolation Theory Electrochimica Acta 49 2004 1547 1554
21. R. Wüthrich, E.A. Baranova, H. Bleuler, and Ch. Comninellis A phenomenological model for macroscopic deactivation of surface processes Electrochemistry Communications 6 2004 1199 1205
22. R. Wüthrich, Ch. Comninellis, H. Bleuler, Bubble evolution on vertical electrodes under extreme current densities, Electrochimica Acta 50 (2005) 5243-5247.
23. V.S.J. Graig, B.W. Ninham, and R.M. Pashley Effect of electrolytes on bubble coalescence Nature 364 1993 317 319
24. V. Fascio: Etude de la microstructuration du verre par étincelage assisté par attaque chimique: une approche electrochimique, Dissertation Thesis (2691) Swiss Federal Institute of Technology, EPF Lausanne 2002.
25. N. Gautam, and V.K. Jain Experimental investigations into ECSD process using various tool kinematics International Journal of Machine Tools and Manufacture 38 1998 15 27
26. C.T. Yang, S.S. Ho, and B.H. Yan Micro hole machining of borosilicate glass trough electrochemical discharge machining (ECDM) Key Engineering Materials 196 2001 149 166
27. R. Wüthrich, K. Fujisaki, Ph. Couthy, L.A. Hof, H. Bleuler SACE in microfactory, Journal of Micromechanics and Microengineering, in press.