The current signal in spark-assisted chemical engraving (SACE): What does it tell us?

Journal of Micromechanics and Microengineering

Volumn 16, Issue 4, 2006, Pages 779-785

  Wuthrich R ^a   Spaelter, U ^a   Bleuler, H ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; ELECTROCHEMICAL CUTTING; ELECTRODES; ELECTROLYTES; GLASS;

GAS FILM; NON-CONDUCTING MATERIALS; SPARK-ASSISTED CHEMICAL ENGRAVING (SACE); SURVEILLANCE SIGNALS;

MICROMACHINING;

EID: 33645085848     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/4/014     Document Type: Article

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