Simple "solutal" method for preparing Teflon nanostructures and molds

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 4, 2007, Pages 1412-1415

  Kim, M Joon ^a   Park, Jeong Eun ^a   Song, Seokyong ^a   Lee, Hong H ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 34547596246     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2752511     Document Type: Note

References (19)

1. R. Chow, G. E. Loomis, and R. L. Ward, J. Vac. Sci. Technol. A 14, 63 (1996).
2. P. Dress, M. Belz, K. Klein, K. T. V. Grattan, and H. Franke, Sens. Actuators B 51, 278 (1998).
3. S. A. Makohliso, L. Giovangrandi, D. Leonard, H. J. Mathieu, M. Ilegems, and P. Aebischer, Biosens. Bioelectron. 13, 1227 (1998).
4. A. Y. Alentiev, V. P. Shantarovich, T. C. Merkel, V. I. Bondar, B. D. Freeman, and Y. P. Yampolskii, Macromolecules 35, 9513 (2002).
5. K. Y. Suh, Y. S. Kim, and H. H. Lee, Adv. Mater. (Weinheim, Ger.) 13, 1386 (2001).
6. D. Y. Khang and H. H. Lee, Adv. Mater. (Weinheim, Ger.) 16, 176 (2004).
7. W. C. Bunyard, T. J. Romack, and J. M. DeSimone, Macromolecules 32, 8224 (1999).
8. J. P. Rolland, E. C. Hagberg, G. M. Denison, K. R. Carter, and J. M. DeSimone, Angew. Chem., Int. Ed. 43, 5796 (2004).
9. D. Y. Khang, H. W. Khang, T. I. Kim, and H. H. Lee, Nano Lett. 4, 633 (2004).
10. D. Y. Khang and H. H. Lee, Langmuir 20, 2445 (2004).
11. L. Zhang, Z. Zhou, B. Cheng, J. M. DeSimone, and E. T. Samulski, Langmuir 22, 8576 (2006).
12. S. J. Choi, P. J. Yoo, S. J. Baek, T. W. Kim, and H. H. Lee, J. Am. Chem. Soc. 126, 7744 (2004).
13. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Appl. Phys. Lett. 67, 3114 (1995).
14. Y. S. Kim, K. Y. Suh, and H. H. Lee, Appl. Phys. Lett. 79, 2285 (2001).
15. Y. S. Kim, K. Y. Suh, and H. H. Lee, Appl. Phys. Lett. 81, 1011 (2002).
16. J. Zhang, J. Li, and Y. Han, Macromol. Rapid Commun. 25, 1105 (2004).
17. A. B. D. Cassie, Trans. Faraday Soc. 44, 11 (1948).
18. D. C. Seo, S. J. Choi, and H. H. Lee, Adv. Mater. (Weinheim, Ger.) 17, 1554 (2005).
19. H. Schmid and B. Michel, Macromolecules 33, 3042 (2000).