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Volumn 46, Issue 17, 2007, Pages 3400-3416

Production and evaluation of silicon immersion gratings for infrared astronomy

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPIC ETCHING; ASTRONOMY; DIELECTRIC PROPERTIES; PHOTOLITHOGRAPHY; SILICON;

EID: 34547508213     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.46.003400     Document Type: Article
Times cited : (84)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.