Improving the optical performance of etched silicon gratings

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3354, Issue , 1998, Pages 357-367

  Kuzmenko, Paul J ^a   Ciarlo, Dino R ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

Echelle; Etched grating; Grating resolution; Grating scatter; Immersion grating; Silicon

Indexed keywords

ECHELLE; ETCHED GRATING; GRATING RESOLUTION; GRATING SCATTER; IMMERSION GRATING;

ABERRATIONS; ANISOTROPIC ETCHING; ASTROPHYSICS; DIFFRACTION GRATINGS; INSTRUMENTS; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; SEMICONDUCTING SILICON; SILICON NITRIDE; SPECTROSCOPIC ANALYSIS; WAVEFRONTS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 60949108539     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.317322     Document Type: Conference Paper

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