Fabrication and performance of silicon immersion gratings for infrared spectroscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6269 III, Issue , 2006, Pages

  Marsh, Jasmina P ^a   Mar, Douglas J ^a   Jaffe, Daniel T ^a  

^a The University of Texas at Austin   (United States)

Author keywords

High resolution; Immersion grating; Infrared spectroscopy; Silicon

Indexed keywords

IMMERSION GRATINGS; SILICON GRATING TECHNOLOGY; SILICON SUBSTRATES;

INFRARED SPECTROMETERS; INFRARED SPECTROSCOPY; LIGHT REFLECTION; OPTICAL RESOLVING POWER; SILICON; SUBSTRATES;

DIFFRACTION GRATINGS;

EID: 33749327659     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.672198     Document Type: Conference Paper

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