Large format silicon immersion gratings for high resolution infrared spectroscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6273 II, Issue , 2006, Pages

  Ge, Jian ^a   McDavitt, Dan ^a   Zhao, Bo ^a   Miller, Shame ^a  

^a 211 Bryant Space Science Center ^*  (United States)

Author keywords

High resolution spectroscopy; IR; Silicon immersion grating

Indexed keywords

HIGH RESOLUTION SPECTROSCOPY; MICRONS; SILICON DISKS; SILICON IMMERSION GRATING;

ASTRONOMY; DIFFRACTION GRATINGS; LIGHT SCATTERING; RESEARCH LABORATORIES; SPACE APPLICATIONS; WAVEFRONTS;

SILICON;

EID: 33749585597     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.670867     Document Type: Conference Paper

References (30)

1. Bechtold, J., et al. 1999, in the report of Conceptual Study of the NGST Science Instrument Module
2. Bernecker, J., Ge, J., McDavitt, D., Hajj, A., Ramsey, L., Fonash, S., & Horn, M. 2000, BAAS, 197, 1510
3. Butler, P. et al. 2004, ApJ, 617, 580
4. Carr, J.S., & Najita, J.R., 1998 in Science With The NGST (Next Generation of Space Telescope), edited by E.P. Smith and A. Koratkar, ASP Conference Series vol. 133, 163
5. Ebizuka, N. et al. 2000, in Imaging the Universe in Three Dimensions. ASP Conf. Vol. 195. Edited by W. van Breugel and J. Bland-Hawthorn, 564
6. Ershov, O.A. et al. 2003, SPIE, 4850, 805.
7. Graf, U.U. et al. 1994, Appl. Opt., 33, 96
8. Ge, J. Angel, J.R.P., & Shelton, C. 1998, SPIE, 3355, 253
9. Ge, J., et al., 1999a, in NGST Science and Technology Exposition, ASP Conference Series, Vol. 207, 457
10. Ge, J., et al., 1999b, BAAS, 195, 1504
11. Ge, J. et al. 2001, Proc. SPIE, 4485, 393
12. Ge, J., McDavitt, L., Miller, S., & Chakraborry, A., 2003, Proc. SPIE, 4835, 172
13. Hulthen, E., & Neuhaus, H., 1954, Nature, 173
14. Jaffe, D.T., Keller, L.D., & Ershov, O.A., 1998, Proc. SPIE, 3354, 201
15. Käufl, H.U., et al. 1998, Proc. SPIE, 3354, 151
16. Keller, L.D., et al. 2000, Appl. Optics, 39, 1094
17. Kuzmenko, P.J., Ciarlo, D.R., & Stevens, C.G., 1994, Proc. SPIE, 2266, 566
18. Kuzmenko, P.J., & Ciarlo, D.R., 1998, Proc. SPIE, 3354, 357
19. Laughlin, G. et al. 2004, ApJ, 612, L73
20. Marsh, J.P. et al. 2003, SPIE, 4850, 797.
21. Mayor, M. & Queloz, D. 1995, Nature, 378, 355
22. McDavitt, D.L., Ge, J., Miller, S., & Wang, J. 2004, Proc. SPIE, 5494, 536
23. th AAS meeting in DC.
24. Najita, J. et al. 2005, in the Protostars and Planets V conference in Hawaii National Academy of Sciences: 2001, Astronomy and Astrophysics in the New Millennium, National Academy Press, Washington DC.
25. MacFarlaneetal. 1958 Phys. Rev., 111, 1245
26. Sica, L.J. 1984, United Stated Patent (4, 474, 792).
27. Tong & Gosele 1999, "Semiconductor wafer bonding: science and technology," John Wiley & Sons, Inc.
28. Tsang, W.T., & Wang, S., 1975, J. Appl. Phys., 46, 2163
29. Vitali, F. et al. 2000, Proc. SPIE, 4008, 2000
30. Wiedemann, G., & Jennings, D.E., 1993, Appl. Opt., 32, 1176