Electrical properties of organic light-emitting diodes by indium tin oxide chemical-mechanical polishing process

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 25, Issue 4, 2007, Pages 999-1002

  Choi, Gwon Woo ^a   Seo, Yong Jin ^b   Lee, Kang Yeon ^a   Lee, Woo Sun ^a  

^a Chosun University   (South Korea)

^b Daebul University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MECHANICAL POLISHING; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC PROPERTIES; ELECTRODES; GLASS; SHEET RESISTANCE; SURFACE MORPHOLOGY; TIN OXIDES;

CMP APPLICATION; ITO THIN FILM; OPTIMIZED PROCESS; PROCESS PARAMETERS;

ORGANIC LIGHT EMITTING DIODES (OLED);

EID: 34547357288     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2746051     Document Type: Article

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