Preparation and characterization of ITO films deposited on polyimide by reactive evaporation at low temperature

Applied Surface Science

Volumn 151, Issue 3, 1999, Pages 239-243

  Ma, Jin ^a   Zhang, Dehang ^a   Zhao, Junqing ^a   Tan, Chuenyu ^a   Yang, Tianlin ^b   Ma, Honglei ^a  

^a SHANDONG UNIVERSITY   (China)

^b Shandong 255200   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; DEPOSITION; ELECTRIC PROPERTIES; EVAPORATION; FILM PREPARATION; INDIUM COMPOUNDS; OPTICAL PROPERTIES; PLASTIC FILMS; POLYIMIDES; SUBSTRATES; THERMAL EFFECTS; THIN FILMS;

INDIUM TIN OXIDE; REACTIVE EVAPORATION;

CONDUCTIVE FILMS;

EID: 0033339292     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00279-2     Document Type: Article

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