-
1
-
-
0029350360
-
A bi-directional silicon micropump[J]
-
Zengerle R, Ulrich J, Kluge S, Richter M, Richter A. A bi-directional silicon micropump[J]. Sensor and Actuators, 1995, A50: 81-86.
-
(1995)
Sensor and Actuators
, vol.A50
, pp. 81-86
-
-
Zengerle, R.1
Ulrich, J.2
Kluge, S.3
Richter, M.4
Richter, A.5
-
2
-
-
0031165299
-
Micromachined flat-walled valveless nozzle pumps[J]
-
Olsson A, Enoksson P, Stemme G, Stemme E. Micromachined flat-walled valveless nozzle pumps[J]. Journal of Microelectromechanical Systems, 1997, 6: 161-166.
-
(1997)
Journal of Microelectromechanical Systems
, vol.6
, pp. 161-166
-
-
Olsson, A.1
Enoksson, P.2
Stemme, G.3
Stemme, E.4
-
3
-
-
0033741496
-
Fabrication and test of a thermopneumatic micropump with a corrugated p+ diaghragm[J]
-
Jeong O C, Yang S S. Fabrication and test of a thermopneumatic micropump with a corrugated p+ diaghragm[J]. Sensor and Actuators, 2000, A83: 249-255.
-
(2000)
Sensor and Actuators
, vol.A83
, pp. 249-255
-
-
Jeong, O.C.1
Yang, S.S.2
-
4
-
-
0030352391
-
-
Yang Yue, Zhou Zhao-ying, Ye Xiong-ying, Jiang Xiaoning. Bimetallic thermally actuated micropump [C]// ASME 1996, Dynamic Systems and Control, Division DSC, v59, MEMS, Atlanta, GA. 1996: 351-354.
-
Yang Yue, Zhou Zhao-ying, Ye Xiong-ying, Jiang Xiaoning. Bimetallic thermally actuated micropump [C]// ASME 1996, Dynamic Systems and Control, Division DSC, v59, MEMS, Atlanta, GA. 1996: 351-354.
-
-
-
-
5
-
-
0034441338
-
-
Khoo M, Liu Chang. A novel micromachined magnetic membrane microfluid pump[C]//IEEE Proceedings of 22nd Annual EMBS International Conference, Chicago, IL. 2000: 2394-2397.
-
Khoo M, Liu Chang. A novel micromachined magnetic membrane microfluid pump[C]//IEEE Proceedings of 22nd Annual EMBS International Conference, Chicago, IL. 2000: 2394-2397.
-
-
-
-
6
-
-
0035948960
-
Characteristics and fabrication of NiTi/Si diaphragm micropump [J]
-
Xu Dong, Wang Li, Ding Gui-fu, Zhou Yong, Yu Aibing, Cai Bing-chu. Characteristics and fabrication of NiTi/Si diaphragm micropump [J]. Sensor and Actuators, 2001, A93: 87-92.
-
(2001)
Sensor and Actuators
, vol.A93
, pp. 87-92
-
-
Dong, X.1
Li, W.2
Gui-fu, D.3
Yong, Z.4
Aibing, Y.5
Bing-chu, C.6
-
7
-
-
0032188127
-
Numerical simulation and optimization of planar electromagnetic actuators[J]
-
Feustel A, Krusemark O, Müller J. Numerical simulation and optimization of planar electromagnetic actuators[J]. Sensors and Actuators, 1998, A70: 276-282.
-
(1998)
Sensors and Actuators
, vol.A70
, pp. 276-282
-
-
Feustel, A.1
Krusemark, O.2
Müller, J.3
-
8
-
-
84881003073
-
Efficient magnetic microactuator with an enclosed magnetic core[J]
-
Ko C H, Yang J J, Chiou J C. Efficient magnetic microactuator with an enclosed magnetic core[J]. Journal of Microlithography, Microfabrication and Microsystem, 2002, 1(2): 144-149.
-
(2002)
Journal of Microlithography, Microfabrication and Microsystem
, vol.1
, Issue.2
, pp. 144-149
-
-
Ko, C.H.1
Yang, J.J.2
Chiou, J.C.3
-
9
-
-
0000115145
-
A bi-directional magnetic micropump on a silicon wafer[C]//
-
Hilton Head Island, SC
-
Zhang Wen-jin, Ahn C H. A bi-directional magnetic micropump on a silicon wafer[C]// IEEE Solid State Sensor and Actuator Workshop, Hilton Head Island, SC. 1996: 94-97.
-
(1996)
IEEE Solid State Sensor and Actuator Workshop
, pp. 94-97
-
-
Wen-jin, Z.1
Ahn, C.H.2
-
10
-
-
0141884166
-
Fabrication of Nd-Fe-B thick-film magnets by high-speed PLD method[J]
-
Nakano M, Katoch R, Fukunaga H, Tutumi S, Yamashita F. Fabrication of Nd-Fe-B thick-film magnets by high-speed PLD method[J]. IEEE Transaction Magnetism, 2003, 39: 2863-2865.
-
(2003)
IEEE Transaction Magnetism
, vol.39
, pp. 2863-2865
-
-
Nakano, M.1
Katoch, R.2
Fukunaga, H.3
Tutumi, S.4
Yamashita, F.5
-
11
-
-
7244221351
-
Composite elastic magnet film with hard magnetic feature[J]
-
Wang Wei-song, Yao Zhong-mei, Chen Jackie C, Fang Ji. Composite elastic magnet film with hard magnetic feature[J]. Journal of Micromechanics and Microengineering, 2004, 14: 1321-1327.
-
(2004)
Journal of Micromechanics and Microengineering
, vol.14
, pp. 1321-1327
-
-
Wei-song, W.1
Zhong-mei, Y.2
Chen Jackie, C.3
Ji, F.4
-
12
-
-
0029771208
-
Electroplated thick CoNiMnP permanent magnet arrays for micromachined magnetic device applications[C]//
-
San Diego, CA
-
Liakopoulos T M, Zhang Wen-jin, Ahn C H. Electroplated thick CoNiMnP permanent magnet arrays for micromachined magnetic device applications[C]// IEEE Proceedings MEMS'96, San Diego, CA. 1996: 79-84.
-
(1996)
IEEE Proceedings MEMS'96
, pp. 79-84
-
-
Liakopoulos, T.M.1
Wen-jin, Z.2
Ahn, C.H.3
-
15
-
-
0032141076
-
Micronozzles as dynamic passive valves for micropump applications [J]
-
Gerlach T. Micronozzles as dynamic passive valves for micropump applications [J]. Sensors and Actuators, 1998, A69: 181-191.
-
(1998)
Sensors and Actuators
, vol.A69
, pp. 181-191
-
-
Gerlach, T.1
-
18
-
-
0029370811
-
Fabrication of stator winding of electromagnetism micromotor [J]
-
in Chinese
-
Zhao Xiao-lin, Song Bai-quan, Zou Di. Fabrication of stator winding of electromagnetism micromotor [J]. Microfabrication Techonology, 1995, 3: 44-48 (in Chinese).
-
(1995)
Microfabrication Techonology
, vol.3
, pp. 44-48
-
-
Xiao-lin, Z.1
Bai-quan, S.2
Di, Z.3
|