-
2
-
-
0041366489
-
A surface micromachined electrostatic microrelay
-
Nürnberg, Germany
-
I. Schiele, Ch. Evers, B. Hillerich, F. Kozlowski, A surface micromachined electrostatic microrelay, Proc. IV Sensor 97, Nürnberg, Germany, 1997, pp. 87-91.
-
(1997)
Proc. IV Sensor 97
, pp. 87-91
-
-
Schiele, I.1
Evers, Ch.2
Hillerich, B.3
Kozlowski, F.4
-
3
-
-
0042906144
-
A new bidirectional micropump for liquids and gases
-
26-28 June Bremen, Germany
-
M. Stehr, S. Messner, R. Zengerle, A new bidirectional micropump for liquids and gases, Proc. Actuator 96, 26-28 June 1996, Bremen, Germany, pp. 61-64.
-
(1996)
Proc. Actuator 96
, pp. 61-64
-
-
Stehr, M.1
Messner, S.2
Zengerle, R.3
-
4
-
-
0027695246
-
A valveless diffusor/nozzle-based fluid pump
-
E. Stemme, G. Stemme, A valveless diffusor/nozzle-based fluid pump, Sensors and Actuators A 39 (1993) 159-167.
-
(1993)
Sensors and Actuators A
, vol.39
, pp. 159-167
-
-
Stemme, E.1
Stemme, G.2
-
5
-
-
0025698137
-
Integrated micro flow control systems
-
M. Esashi, Integrated micro flow control systems, Sensors and Actuators A21-A23 (1990) 161-167.
-
(1990)
Sensors and Actuators
, vol.A21-A23
, pp. 161-167
-
-
Esashi, M.1
-
6
-
-
0028312580
-
LIGA micropump for gases and liquids
-
R. Rapp, W.K. Schomburg, D. Mass, J. Schulz, W. Stark, LIGA micropump for gases and liquids, Sensors and Actuators A 40 (1994) 57-61.
-
(1994)
Sensors and Actuators A
, vol.40
, pp. 57-61
-
-
Rapp, R.1
Schomburg, W.K.2
Mass, D.3
Schulz, J.4
Stark, W.5
-
7
-
-
0025698116
-
A thermopneumatic micropump based on micro-engineering techniques
-
F.C.M. van de Pol, H.T.G. van Lintel, M. Elvenspoek, J.H.J. Fluitman, A thermopneumatic micropump based on micro-engineering techniques, Sensors and Actuators A21-A23 (1990) 198-202.
-
(1990)
Sensors and Actuators
, vol.A21-A23
, pp. 198-202
-
-
Van De Pol, F.C.M.1
Van Lintel, H.T.G.2
Elvenspoek, M.3
Fluitman, J.H.J.4
-
8
-
-
0013453904
-
A monolithic silicon micro-liquid handling system with bimetallic valve and calorimetric flow sensor
-
26-28 June Bremen, Germany
-
J. Franz, H. Baumann, H.-P. Trah, A monolithic silicon micro-liquid handling system with bimetallic valve and calorimetric flow sensor, Proc. Actuator 96, 26-28 June 1996, Bremen, Germany, pp. 29-32.
-
(1996)
Proc. Actuator 96
, pp. 29-32
-
-
Franz, J.1
Baumann, H.2
Trah, H.-P.3
-
9
-
-
0037599704
-
Giant magnetostrictive materials and their application - Comparative analysis and future aspects
-
26-28 June Bremen, Germany
-
H. Uchida, H. Kaneko, Giant magnetostrictive materials and their application - comparative analysis and future aspects, Proc. Actuator 96, 26-28 June 1996, Bremen, Germany, pp. 262-267.
-
(1996)
Proc. Actuator 96
, pp. 262-267
-
-
Uchida, H.1
Kaneko, H.2
-
10
-
-
0030110089
-
An electrochemical microactuator: Principle and first results
-
C.R. Neagu, J.G.E. Gardeniers, M. Elwenspoek, J.J. Kelly, An electrochemical microactuator: principle and first results, J. Microelectromech. Syst. 5 (1) (1996) 2-9.
-
(1996)
J. Microelectromech. Syst.
, vol.5
, Issue.1
, pp. 2-9
-
-
Neagu, C.R.1
Gardeniers, J.G.E.2
Elwenspoek, M.3
Kelly, J.J.4
-
11
-
-
0029272962
-
A microminiature electromagnetic middle-ear implant hearing device
-
W. Affane, T.S. Birch, A microminiature electromagnetic middle-ear implant hearing device, Sensors and Actuators A 46-47 (1995) 584-587.
-
(1995)
Sensors and Actuators A
, vol.46-47
, pp. 584-587
-
-
Affane, W.1
Birch, T.S.2
-
12
-
-
0003744286
-
Electromagnetic actuation for micropumps and valves
-
26-28 June Bremen, Germany
-
A.M. Behrens, M. Gebhard, W. Benecke, Electromagnetic actuation for micropumps and valves, ACTUATOR 96, 5th Int. Conf. On New Actuators, 26-28 June 1996, Bremen, Germany, pp. 124-127.
-
(1996)
Actuator 96, 5th Int. Conf. On New Actuators
, pp. 124-127
-
-
Behrens, A.M.1
Gebhard, M.2
Benecke, W.3
-
13
-
-
85033931285
-
Electromagnetically actuated membrane pump
-
Potsdam (Ger.), September 17-19
-
A. Feustel, O. Krusemark, J. Müller, Electromagnetically actuated membrane pump, MST 96, 5th Int. Conf. On Micro, Electro, Opto, Mechanical Systems and Components, Potsdam (Ger.), September 17-19, 1996, pp. 787-789.
-
(1996)
MST 96, 5th Int. Conf. On Micro, Electro, Opto, Mechanical Systems and Components
, pp. 787-789
-
-
Feustel, A.1
Krusemark, O.2
Müller, J.3
-
14
-
-
0005379979
-
Magnetically driven microactuators: Design considerations
-
Berlin
-
B. Wagner, W. Benecke, Magnetically driven microactuators: design considerations, Conference Program MST 90, Berlin 1990.
-
(1990)
Conference Program MST 90
-
-
Wagner, B.1
Benecke, W.2
-
15
-
-
0026882942
-
The case for magnetically driven microactuators
-
I.J. Basch-Vishniac, The case for magnetically driven microactuators, Sensors and Actuators A 33 (1992) 207-220.
-
(1992)
Sensors and Actuators A
, vol.33
, pp. 207-220
-
-
Basch-Vishniac, I.J.1
-
16
-
-
0003814739
-
Electromagnetic membrane actuator with a compliant silicone suspension
-
26-28 June Bremen, Germany
-
A. Feustel, O. Krusemark, U. Lehmann, J. Müller, T. Sperling, Electromagnetic membrane actuator with a compliant silicone suspension, ACTUATOR 96, 5th Int. Conf. On New Actuators, 26-28 June 1996, Bremen, Germany, pp. 76-79.
-
(1996)
Actuator 96, 5th Int. Conf. On New Actuators
, pp. 76-79
-
-
Feustel, A.1
Krusemark, O.2
Lehmann, U.3
Müller, J.4
Sperling, T.5
-
17
-
-
0025723096
-
Microfabricated actuator with moving permanent magnet
-
Nara, Japan, Jan. 30-Feb.
-
B. Wagner, W. Benecke, Microfabricated actuator with moving permanent magnet, Proc. IEEE Micro Electro Mechanical Systems, Nara, Japan, Jan. 30-Feb. 2, 1991, pp. 27-32.
-
(1991)
Proc. IEEE Micro Electro Mechanical Systems
, vol.2
, pp. 27-32
-
-
Wagner, B.1
Benecke, W.2
|