A bimetallic thermally actuated micropump

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 59, Issue , 1996, Pages 351-354

  Yang, Yue ^a   Zhou, Zhaoying ^a   Ye, Xiongying ^a   Jiang, Xiaoning ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BIMETALS; FLOW MEASUREMENT; FLOW OF FLUIDS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SILICON; VALVES (MECHANICAL);

BIMETALLIC THERMALLY ACTUATED MEMBRANE MICROPUMP; SILICON MICROMACHINING TECHNIQUE;

PUMPS;

EID: 0030352391     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (6)

1. Yang Yue, Zhou Zhaoying, Ye Xiongying, Li Yong, 1995, "A Thermally actuated micropump". Transducers'95 · Eurosensors IX, Late News Contributions, pp.81-82.
2. Jiang Xiaoning, Zhou Zhaoying, Li Yong, 1995, "Microfluid flow in micorchannel". Digest of Technical Papers on Transducers'95 · Eurosensors K Vol.2, pp.317-320.
3. Nakagawa S., Shoij S., Esashi M., 1990, "A micro chemical analyzing system integrated on a silicon wafer", IEEE-MEMS, pp.203-206.
4. Zengerle R., Richter A., Sandmaier H., 1992, "A micro membrane pump with electrostatic actuation", Proc. IEEE MEMS, pp. 19-24.
5. van de Pol F.C.M., van Lintel H.T.G., Elwenspoek M., 1990, "A thermopneumatic micropump based on micro-engineering techniques", Sensors & Actuators, Vol. A21-A23, pp.193-197.
6. J.Jermam, "Electrically-activated micromachined diaphragm valves", Technical Digest of IEEE Solid-State Sensors and Actuators Workshop, 1990, pp.65-69.