Sol-gel synthesis of thick Ta 2O 5 films

Chemistry of Materials

Volumn 19, Issue 13, 2007, Pages 3155-3161

  Ndiege, Nicholas ^a   Wilhoite, Tabitha ^a   Subramanian, Vaidyanathan ^a,b   Shannon, Mark A ^a   Masel, Richard I ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b UNIVERSITY OF NEVADA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRACK-FREE; HIGH TEMPERATURE SYSTEMS; INCIDENT INFRARED RADIATION; QUARTER WAVELENGTH;

INSULATING MATERIALS; MEMS; REFRACTION; SOL-GEL PROCESS; SYNTHESIS (CHEMICAL); TANTALUM COMPOUNDS;

THICK FILMS;

EID: 34547285696     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm062231w     Document Type: Article

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