SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 323, Issue 1-2, 1998, Pages 6-9

Microstructure of Ta2O5 films grown by the anodization of TaNx

(2) Werder, D J a Kola, R R a

a LUCENT TECHNOLOGIES (United States)

Author keywords

Anodization; Dielectric constant; Microstructure; Tantalum oxide; Transmission electron microscopy

Indexed keywords

AMORPHOUS MATERIALS; ANODIC OXIDATION; ELECTRIC BREAKDOWN OF SOLIDS; FILM GROWTH; MICROSTRUCTURE; MULTILAYERS; PERMITTIVITY; TANTALUM COMPOUNDS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; VOLUME FRACTION;

TANTALUM OXIDE;

DIELECTRIC FILMS;

EID: 0032096284 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(97)01193-0 Document Type: Article

Times cited : (19)

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