Recent developments on microablation of glass materials using excimer lasers

Optics and Lasers in Engineering

Volumn 45, Issue 10, 2007, Pages 975-992

  Tseng, Ampere A ^a   Chen, Ying Tung ^b   Chao, Choung Lii ^c   Ma, Kung Jeng ^d   Chen, T P ^e  

^a NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^b NATIONAL DEFENSE UNIVERSITY   (Taiwan)

^c TAMKANG UNIVERSITY   (Taiwan)

^d CHUNG HUA UNIVERSITY   (Taiwan)

^e NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Ablation; Curved surface; Diffraction grating; Excimer laser; Fused silica; Glass; Microlens; Micromachining; Microneedles; Waveguides

Indexed keywords

ABLATION RATE; BIOMEDICAL MICROSYSTEMS; CURVE SURFACES; MICROABLATION; MICRONEEDLES; SUBMICRON GRATING;

DIFFRACTION GRATINGS; EXCIMER LASERS; FUSED SILICA; LASER ABLATION; MICROLENSES; MICROMACHINING; MICROSTRUCTURE; OPTICAL WAVEGUIDES; PHOTONIC CRYSTALS; SURFACE MORPHOLOGY;

GLASS;

EID: 34447643559     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2007.04.003     Document Type: Review

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