Drilling of glass by excimer laser mask projection technique

Journal of Laser Applications

Volumn 12, Issue 5, 2000, Pages 189-193

  Keiper, Bernd ^a   Exner, Horst ^a   Löschner, Udo ^a   Kuntze, Thomas ^a  

^a UNIVERSITY OF APPLIED SCIENCES MITTWEIDA   (Germany)

Author keywords

Excimer laser; Laser microdrilling; Mask projection technique; Pyrex glass

Indexed keywords

EID: 0039381956     PISSN: 1042346X     EISSN: None     Source Type: Journal    
DOI: 10.2351/1.1309553     Document Type: Article

References (5)

1. B. Wolff and P. Simon, "Nanosecond and femtosecond excimer laser ablation of fused silica," Appl. Phys. A: Solids Surf. 54, 363-368 (1992).
2. R. Nowak, S. Metev, and G. Sepold, "Excimer laser processing of BK7 and BGG31 glasses," Glastech Ber. 66, 227-233 (1993).
3. C. Buerhop, N. Lutz, R. Weißmann, and G. Tomandi, "Surface treatment of glass and ceramics using XeCl excimer laser radiation," Glastech. Ber. 66, 61-67 (1993).
4. H. Exner, B. Keiper, and P. Meja, Microstructuring of materials by pulsed laser focusing and projection technique. Presented at Photonics West '99, 23-29 January 1999, San Jose, California, published in "Laser Applications in Microelectronic and Optoelectronic Manufacturing IV," edited by Jan J. Dubowski, H. Helvajian, E. W. Kreutz, and K. Sugioka, Proc. SPIE 3618, 340-347 (1999).
5. H. Exner, B. Keiper, and P. Meja, Microstructuring of materials by pulsed laser focusing and projection technique. Presented at Photonics West '99, 23-29 January 1999, San Jose, California, published in "Laser Applications in Microelectronic and Optoelectronic Manufacturing IV," edited by Jan J. Dubowski, H. Helvajian, E. W. Kreutz, and K. Sugioka, Proc. SPIE 3618, 340-347 (1999).