Laser-assisted chemical etching for embedded microchannels and overhanging microstructures on Si/SiO2 substrates

Journal of Laser Applications

Volumn 14, Issue 3, 2002, Pages 185-190

  Vakanas, George P ^a,b   Tseng, Ampere A ^a   Winer, Paul ^b  

^a Arizona State University   (United States)

^b INTEL CORPORATION   (United States)

Author keywords

Laser assisted chemical etching (LACE); Micromachining of embedded microchannels; Micromachining of overhanging microstructures; Thermofluidic MEMS rapid prototyping

Indexed keywords

ETCHING; LASER ABLATION; MICROMACHINING; MICROSTRUCTURE; RAPID PROTOTYPING; REACTION KINETICS; SILICA; THERMOANALYSIS;

LASER-ASSISTED CHEMICAL ETCHING (LACE);

LASER CHEMISTRY;

EID: 0036688559     PISSN: 1042346X     EISSN: None     Source Type: Journal    
DOI: 10.2351/1.1493767     Document Type: Article

References (12)

1. Laser-chemical three-dimensional writing for microelectromechanics and application to standard-cell microfluidics
2. Laser-chemical 3D writing of multimaterial structures for microelectromechanics
3. Laser ablation desorption
4. High performance heat sinking for VLSI
5. Direct-write laser microfabrication for magneto-thermo-fluidic MEMS
6. Direct-write (DW) laser microfabrication (LμF) for magneto-thermo-fluidic (MTF) MEMS: Applications