Micro-lens machining on optical fibers by direct laser ablation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5578, Issue PART 2, 2004, Pages 589-595

  Fricke Begemann, Thomas ^a   Li, Jianzhao ^b   Ihlemann, Jürgen ^a   Herman, Peter R ^b   Marowsky, Gerd ^a  

^a LASER LABORATORIUM GÖTTINGEN E V   (Germany)

^b UNIVERSITY OF TORONTO   (Canada)

Author keywords

157 nm; Ablation; F2 laser; Fiber lens; Fused silica; Microfabrication

Indexed keywords

ABLATION; ENDOSCOPY; FUSED SILICA; LASER ABLATION; MICROLENSES; MICROMACHINING; MICROSTRUCTURE; NITROGEN; OPTICAL SENSORS; STAINLESS STEEL; TELECOMMUNICATION EQUIPMENT;

157 NM; F2-LASERS; FIBER-LENS; GRADIENT INDEX (GRIN) LENSES; MICRO-LENS MACHINING; MICROFABRICATION;

OPTICAL FIBERS;

EID: 21944448329     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.567671     Document Type: Conference Paper

References (9)

1. C. Gomez-Reino, M.V. Perez, C. Bao, Gradient-Index Optics, Springer-Verlag, Berlin, 2002.
2. K. Naessens, P. Van Daele and R. Baets, "Excimer laser ablation based microlens fabrication for optical fiber coupling purposes," in Laser Micromachining for Optoelectronic Device Fabrication, A. Ostendorf, ed., Proc. SPIE 4941, pp. 133-139, 2003.
3. M. Osborne, "Laser machining of optical fibers," oral presentation at Fourth international symposium on Laser Precision Microfabrication, Munich, June 21-24, 2003. See also: http://www.optek.co.uk/.
4. C. Buerhop, B. Blumenthal, R. Weissmann, N. Lutz, and S. Biermann, "Glass surface treatment with excimer lasers," Appl. Surf. Sci. 46, pp. 430-434, 1990.
5. P.R. Herman, R.S. Marjoribanks, A. Oettl, K.P. Chen, I. Konovalov and S. Ness, "Laser shaping of photonic materials: deep ultraviolet and ultrafast lasers," Appl. Surf. Sci. 154-155, pp. 577-586, 2000.
6. T. Temme, A. Ostendorf and C. Kulik, "Machining of optical microstructures with 157 nm laser radiation," in Laser Precision Microfabrication, I. Miyamoto, A. Ostendorf, K. Sugioka, H. Helvajan, eds., Proc. SPIE 5063, pp. 233-237, 2003.
7. J. Li and P.R. Herman, "Vacuum-Ultraviolet Laser Nano-Milling of Surface-Relief Gratings on Optical Fiber Ends", CLEO, Tech. Digest, Paper CTuF7 (OSA, Wash DC) Baltimore, Md., 1-6 June 2003.
8. J. Békési, D. Schäfer, J. Ihlemann and P. Simon, "Fabrication of diffractive optical elements by ArF-laser ablation of fused silica," in Photon Processing in Microelectronics and Photonics II, A. Pique et al., eds., Proc. SPIE 4977, pp. 235-240, 2003.
9. 2-lasers: high-resolution optical processing system for shaping photonic components," in Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, M.C. Gower, H. Helvajian, K. Sugioka, J. Dubowski, eds., Proc. SPIE 4274, pp. 149-157, 2001.