Bending characteristics of SU-8

Micro and Nano Letters

Volumn 2, Issue 2, 2007, Pages 20-23

  Spratley, J P F ^a   Ward, M C L ^a   Hall, P S ^a  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING (FORMING); ELASTIC MODULI; MATHEMATICAL MODELS; PLASTIC DEFORMATION; STRESS ANALYSIS;

PLANE BENDING;

PHOTORESISTS;

ACCURACY; ARTICLE; MATHEMATICAL MODEL; MECHANICAL STRESS; PLASTICITY; PREDICTION; SURFACE PROPERTY; YOUNG MODULUS;

EID: 34447126928     PISSN: None     EISSN: 17500443     Source Type: Journal    
DOI: 10.1049/mnl:20070022     Document Type: Article

References (20)

1. Chang, S., Warren, J., and Chiang, F.: ' Mechanical testing of EPON SU-8 with SEIM ', Microscale systems: Mechanics and Measurements Symp., June, 2000
2. Hopcroft, M., Kramer, T., Kim, G., Takashima, K., Higo, Y., Moore, D., and Brugger, J.: ' Micromechanical testing of SU-8 cantilevers ', Fatigue Fracture Eng. Materials Struct., 2005, 28, (8), p. 735-742
3. Lorenz, H., Despont, M., Fahrni, N., LaBianca, N., Renaud, P., and Vettiger, P.: ' SU-8: a low-cost negative resist for MEMS ', J. Micromech. Microeng., 1997, 7, (3), p. 121-124 0960-1317
4. Lorenz, H., Laudon, M., and Renaud, P.: ' Mechanical characterization of a new high-aspect-ratio near UV-photoresist ', Microelectron. Eng., 1998, 42, p. 371-374 0167-9317
5. Lorenz, H., Despont, M., Fahrni, N., Brugger, J., Vettiger, P., and Renaud, P.: ' High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS ', Sensors Actuators A Phys., 1998, 64, (1), p. 33-39
6. McAleavey, A., Coles, G., Edwards, R.L., and Sharpe, W.N.: ' Mechanical properties of SU-8. Materials science of microelectromechanical systems (MEMS) devices ', Proc. Symp., 1998, p. 213-218
7. Lee, K.Y., LaBianca, N., Rishton, S.A., Zolgharnain, S., Gelorme, J.D., Shaw, J., and Chang, T.H.P.: ' Micromachining applications of a high resolution ultrathick photoresist ', J Vacuum Sci. Technol. B, 1995, 13, (6), p. 3012-3016
8. Foulds, I.G., and Parameswaran, M.: ' A planar self-sacrificial multilayer SU-8-based MEMS process utilizing a UV-blocking layer for the creation of freely moving parts ', J Micromech. Microeng., 2006, 16, (10), p. 2109-2115 0960-1317
9. Ling, Z., and Lian, K.: ' In situ fabrication of SU-8 movable parts by using PAG-diluted SU-8 as the sacrificial layer ', Microsys. Technol.-Micro-and Nanosyst.-Inform. Storage Process. Syst., 2007, 13, (3-4), p. 253-257
10. Dellmann, L., Roth, S., Beuret, C., Racine, G.A., Lorenz, H., Despont, M., Renaud, P., Vettiger, P., and de Rooij, N.F.: ' Fabrication process of high aspect ratio elastic structures for piezoelectric motor applications ', 1997, p. 641-644
11. Li, J.H., Chen, D., Zhang, J.Y., Liu, J.Q., and Zhu, J.: ' Indirect removal of SU-8 photoresist using PDMS technique ', Sensors Actuators A Phys., 2006, 125, (2), p. 586-589
12. Choi, H.S., Lee, D.C., Kim, S.S., and Han, C.S.: ' The development of a microgripper with a perturbation-based configuration design method ', J. Micromech. Microeng., 2005, 15, (6), p. 1327-1333 0960-1317
13. Chronis, N., and Lee, L.P.: ' Electrothermally activated SU-8 microgripper for single cell manipulation in solution ', J. Microelectromech. Syst., 2005, 14, (4), p. 857-863 1057-7157
14. Nguyen, N.T., Ho, S.S., and Low, C.L.N.: ' A polymeric microgripper with integrated thermal actuators ', J Micromech. Microeng., 2004, 14, (7), p. 969-974 0960-1317
15. Roch, I., Bidaud, P., Collard, D., and Buchaillot, L.: ' Fabrication and characterization of an SU-8 gripper actuated by a shape memory alloy thin film ', J. Micromech. Microeng., 2003, 13, (2), p. 330-336 0960-1317
16. Abgrall, P., Lattes, C., Conederal, V., Dollat, X., Colin, S., and Gue, A.M.: ' A novel fabrication method of flexible and monolithic 3D microfluidic structures using lamination of SU-8 films ', J. Micromech. Microeng., 2006, 16, (1), p. 113-121 0960-1317
17. Gray, B.L., and Jaffer, S.: ' Mechanical and microfluidic interconnects fabricated in SU-8 photopolymer ', Icmm 2005: 3Rd Int. Conf. on Microchannels and Minichannels, Pt B, 2005, p. 585-591
18. Sato, H., Matsumura, H., Keino, S., and Shoji, S.: ' An all SU-8 microfluidic chip with built-in 3D fine microstructures ', J. Micromech. Microeng., 2006, 16, (11), p. 2318-2322 0960-1317
19. Spratley, J.P.F., Ward, M.C.L., Hall, P.S., and Thursfield, C.: ' Design of an injectible microsensor to wirelessly transmit signals from the motor cortex of the human brain ', The IET Seminar on MEMS Sensors and Actuators, April, 2006
20. Namazu, T., Inoue, S., Takio, K., Fujita, T., Maenaka, K., and Koterazawa, K.: ' Visco-elastic properties of micron-thick SU-8 polymers measured by two different types of uniaxial tensile tests ', Micro Electro Mechanical Systems, 2005. MEMS 2005.18th IEEE Int. Conf., 2005, p. 447-450