Multifunctional thin film zinc oxide semiconductors: Application to electronic devices

Materials Science Forum

Volumn 514-516, Issue PART 1, 2006, Pages 3-7

  Fortunato, E ^a   Goncalves A ^a   Marques, A ^a   Pimentel, A ^a   Barquinha, P ^a   Aguas H ^a   Pereira, L ^a   Raniero, L ^a   Goncalves G ^a   Ferreira, I ^a   Martins, R ^a  

^a UNIVERSIDADE NOVA DE LISBOA   (Portugal)

Author keywords

rf magnetron sputtering; Transparent conductive oxides; UV ozone sensors; ZnO thin films

Indexed keywords

ELECTRODES; MAGNETRON SPUTTERING; OPTOELECTRONIC DEVICES; SOLAR CELLS; THIN FILMS; ZINC OXIDE;

RF MAGNETRON SPUTTERING; TRANSPARENT CONDUCTIVE OXIDES;

SEMICONDUCTOR MATERIALS;

EID: 34347397216     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.514-516.3     Document Type: Conference Paper

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