Simulation of squeeze-film damping of microplates actuated by large electrostatic load

Journal of Computational and Nonlinear Dynamics

Volumn 2, Issue 3, 2007, Pages 232-241

  Younis, Mohammad I ^a   Nayfeh, Ali H ^b  

^a State University of New York   (United States)

^b Virginia Polytechnic Institute and State University   (United States)

Author keywords

Electrostatic actuation; Large deflections; Squeeze film damping; Von K rm n plate equations

Indexed keywords

ELECTROSTATIC FORCE; EULER EQUATIONS; FINITE ELEMENT METHOD; NATURAL FREQUENCIES; PERTURBATION TECHNIQUES; PRESSURE DISTRIBUTION; REYNOLDS EQUATION;

ELECTROSTATIC ACTUATION; SQUEEZE-FILM DAMPING; STATIC DEFLECTION;

DAMPING;

EID: 34347364469     PISSN: 15551423     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2727491     Document Type: Article

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